Experimental investigation of plasma parameters in 13.56 MHz/2 MHz cylindrical inductively coupled plasma
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Acta Physica Sinica
سال: 2019
ISSN: 1000-3290
DOI: 10.7498/aps.68.20190071